2 Inch Wafer Cassette Holder 50.8mm Diameter 25-Slot Capacity
The 2-inch Wafer Cassette Holder is a precision carrier device specifically designed for the semiconductor, optoelectronics, and micro/nano manufacturing industries. It is primarily used for securely holding, storing, and transporting 2-inch (50.8mm) wafers or thin-film materials. Manufactured from high-purity materials, it ensures contamination-free and mechanical-damage-free operation during fabrication, inspection, or experimental processes. Its standardized design ensures compatibility with various semiconductor equipment (e.g., lithography machines, etching systems, and deposition devices) and makes it widely applicable in both research laboratories and industrial production lines.
2 inch Wafer Cassette Key Features
(1) High Cleanliness and Contamination Prevention
- 2 inch Wafer Cassette constructed from high-purity polymers (e.g., PEEK, PTFE) or anodized aluminum alloys to minimize particle adsorption, complying with Class 100 or even Class 10 cleanroom standards.
- Some models feature anti-static coatings to prevent electrostatic attraction of particles that could affect wafer surfaces.
(2) High-Precision Positioning and Secure Clamping
- 2 inch Wafer Cassette utilizes V-groove or elastic latch mechanisms to ensure centered wafer fixation, preventing misalignment or slippage with positioning accuracy up to ±0.05mm.
- High-end models may support vacuum suction or magnetic fixation, suitable for high-vibration or high-speed transfer environments.
(3) Modularity and Compatibility
- 2 inch Wafer Cassette configurable with multi-slot designs (e.g., 5-slot, 25-slot) to accommodate batch production or experimental requirements.
- Compatible with automated robotic arms (Robot Arm), enabling seamless integration into semiconductor production line automation systems.
(4) Chemical Resistance and High-Temperature Tolerance
- 2 inch Wafer Cassette employ acid/alkali-resistant ceramics or specialty plastics, making them suitable for wet etching or chemical vapor deposition (CVD) processes.
- High-temperature variants can withstand environments exceeding 200°C, ideal for annealing or high-temperature deposition applications.
2 inch Wafer Cassette Primary Applications
(1) Semiconductor Manufacturing
- Wafer Processing: 2 inch Wafer Cassette used for wafer fixation and transfer in processes such as lithography, etching, and ion implantation.
- Thin-Film Deposition: 2 inch Wafer Cassette serves as a wafer carrier in physical vapor deposition (PVD) and atomic layer deposition (ALD) equipment.
(2) Optoelectronics and MEMS Fabrication
- LED/Laser Chip Production: 2 inch Wafer Cassette holds compound semiconductor wafers (e.g., GaAs, GaN) during manufacturing.
- MEMS Sensor Fabrication: Supports processing and inspection of silicon-based microelectromechanical systems.
(3) Research and Laboratory Use
- Materials Science Research: Secures samples in analytical instruments like X-ray diffraction (XRD) and scanning electron microscopy (SEM).
- Novel Semiconductor Development: Facilitates experimental processes for perovskite and 2D materials (e.g., graphene).
(4) Industrial Testing and Packaging
- Wafer Probing: 2 inch Wafer Cassette provides stable support during electrical performance testing (e.g., IV/CV measurements).
- Chip Packaging: 2 inch Wafer Cassette temporarily holds wafers for dicing or die bonding processes.
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2 inch Wafer Cassette Q&A
1. Q: What is a 2-inch wafer cassette holder used for?
A: 2-inch wafer cassette holder securely stores and transports 25 small wafers (50.8mm) during semiconductor processing, ensuring clean and damage-free handling in Class 100 environments.
2. Q: What materials are 2-inch wafer cassettes made of?
A: They’re typically made of high-purity PEEK, PTFE, or anodized aluminum for contamination control, with some models featuring anti-static coatings for sensitive processes.
Tags: #2 Inch, #Wafer Cassette Holder, #50.8mm Diameter, #25-Slot Capacity, #Class 100 Cleanroom Compatible
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