| Nombre De La Marca: | ZMSH |
High-purity semi-insulating (HPSI) silicon carbide wafers represent advanced semiconductor substrate materials engineered for high-frequency, high-power, and elevated-temperature operational environments. Manufactured in 2-inch through 8-inch diameter configurations, these substrates are available in multiple quality tiers: Prime Grade (for production), Dummy Grade (for process verification), and Research Grade (for experimental purposes), addressing diverse requirements across industrial manufacturing and scientific research.
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| Parameter | Specification |
|---|---|
| Crystal Type | 4H-Semi-Insulating |
| Electrical Resistivity | >10^5 Ω·cm |
| Standard Thickness | 500 ± 25 μm |
| Crystallographic Orientation | <0001> ± 0.25° |
| Thickness Variation (TTV) | ≤ 5 μm |
| Surface Bow | -25 to +25 μm |
| Wafer Warp | ≤ 35 μm |
| Surface Roughness (Si-face) | Ra ≤ 0.2 nm |
This material exhibits extremely high electrical resistivity, effectively minimizing parasitic current leakage in high-frequency and high-voltage applications.
Yes, we support tailored specifications including doping concentration, dimensional parameters, and surface characteristics for Prime and Research Grade products.
Prime Grade wafers feature minimal defect density suitable for active device fabrication, while Dummy Grade provides economical solutions for process testing and equipment calibration.
Each wafer undergoes individual vacuum-sealing using cleanroom-compatible materials to ensure surface integrity during transportation.
Standard specification orders typically ship within 2-4 weeks, while customized requirements generally require 4-6 weeks for fulfillment.
Complete production chain from cutting to final cleaning and packing.
Capability to reclaim wafers with diameters 4-inch—12-inch.
20 year experience of wafering and reclaiming of monocrystalline electronic materials
ZMSH Technology can provide customers with imported and domestic high-quality conductive, 2-6inch semi-insulating and HPSI (High Purity Semi-insulating) SiC substrates in batches; In addition, it can provide customers with homogeneous and heterogeneous silicon carbide epitaxial sheets, and can also be customized according to the specific needs of customers, with no minimum order quantity.