​​High-Purity SiC Vertical Furnace Tube High-Temperature Resistant

​​High-Purity SiC Vertical Furnace Tube High-Temperature Resistant

A Silicon Carbide (SiC) Vertical Furnace Tube is a high-performance ceramic structural component manufactured using processes such as ​​reaction sintering​​ or ​​chemical vapor deposition (CVD)​​. It is specifically designed for extreme environments in ​​semiconductor manufacturing, metallurgy, and high-temperature industries​​. By leveraging the core material properties of silicon carbide—​​high hardness, high stiffness, low thermal expansion, high thermal conductivity, and excellent chemical stability​​—it maintains ​​exceptional dimensional stability (with a coefficient of thermal expansion as low as 4.0-5.0×10⁻⁶/K) and structural integrity​​ under conditions exceeding ​​1700°C​​, in corrosive atmospheres, and during rapid temperature changes. It provides a reliable material solution for high-temperature processes.

SiC Vertical Furnace Tube Characteristics and Advantages

SiC Vertical Furnace Tube Main Application Areas

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• Semiconductor Manufacturing​​: Used as core components such as ​​wafer boats, liner tubes, and thermal baffles​​ in ​​vertical diffusion furnaces and CVD reactors​​, supporting processes like ​​high-temperature oxidation/diffusion and epitaxial growth​​, ensuring wafer processing precision and yield.
• ​​Metallurgy and High-Temperature Processing​​: Serves as ​​furnace linings, crucibles, and load-bearing guides​​ in ​​non-ferrous metal smelting (aluminum, copper, zinc)​​ and ​​steel manufacturing​​, withstanding corrosion from molten metal and high-temperature loads.
• ​​Industrial Kilns and Energy​​: Applied in ​​tunnel kilns and shuttle kilns​​ as ​​high-temperature kiln furniture and burner components​​, and as corrosion-resistant structural parts in ​​new energy equipment (e.g., fuel cells)​​.

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Q1: What is the primary application of a silicon carbide (SiC) vertical furnace tube?​​

​​A1:​​ It is primarily used as a ​​high-temperature reactor tube​​ in ​​semiconductor diffusion furnaces, CVD systems, and industrial kilns​​ (e.g., for SiC/GaN epitaxial growth, oxidation, or annealing processes at 1500–1700°C), providing exceptional thermal stability and corrosion resistance in extreme environments.

​​Q2: Why choose silicon carbide over traditional materials for vertical furnace tubes?​​

​​A2:​​ Silicon carbide offers ​​superior high-temperature strength (up to 1700°C), extreme thermal shock resistance (low CTE ~4.5×10⁻⁶/K), and excellent chemical inertness​​ (resisting acids, alkalis, and plasma erosion), ensuring long service life, minimal maintenance, and stable performance in corrosive atmospheres like HCl or metal vapors.

Tags: #SiC Vertical Furnace Tube, #High-Purity, #Customized, #SiC Ceramics​​, #​High-Temperature Resistant