Escrito: Our team walks you through how Custom Design Quartz Boats perform in common semiconductor processing scenarios. This video demonstrates their use in securely holding silicon wafers during high-temperature processes like diffusion, oxidation, and CVD. You'll see the precision engineering, customization options, and key features that make these quartz boats essential for cleanroom environments.
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Made from high-purity fused quartz (SiO₂) with 99.99% purity for minimal contamination.
Withstands extreme temperatures up to 1200°C without deformation or degradation.
Inert to most chemicals, ensuring no contamination during high-temperature processes.
Low thermal expansion ensures dimensional stability during rapid temperature fluctuations.
Available in standard or customized sizes with various slot geometries and hook designs.
Designed for durability and performance in semiconductor and chemical processing applications.
Compatible with various furnace types and automation-ready for robotic wafer handling systems.
Offers exceptional thermal shock resistance, preventing cracking from rapid temperature changes.
FAQ:
Can quartz boats be reused?
Yes, with proper cleaning and maintenance, quartz boats can be reused multiple times without compromising performance.
How should quartz boats be cleaned?
Quartz boats should be cleaned using acid baths or ultrasonic cleaning methods in compliance with cleanroom standards, while avoiding sudden temperature changes during cleaning.
Are quartz boats compatible with all furnace types?
Yes, quartz boats are compatible with most horizontal and vertical furnace systems used in semiconductor and photovoltaic processing.
What sizes are available for custom orders?
Quartz boats are available in standard sizes for 100mm, 150mm, 200mm, and 300mm wafers, with additional customization available for specialized applications.